Item Specifics
| Seller Item Code | EQ25P02 | Vintage | 1999 |
|---|---|---|---|
| Wafer size | 200MM |
| Seller Item Code | EQ25P02 | Vintage | 1999 |
|---|---|---|---|
| Wafer size | 200MM |
| 1. Product Name & Description | Endura 5500 |
| 2. Equipment manufacturer | APPLIED MATERIALS |
| 3. Configuration & Features | SIP CU + SIP Ta(N) |
| 4. Process | PVD CU |
| 5.Equipment list |
Endura 5500 - 1 DMD Degas x2 P-Clean x2 SIP CU x2 ( Miss ESC ) SIP Ta(N) x2 ( B101 Hearer ) OB-8F 3PH x3
Endura 5500 - 2 DMD Degas x1 P-Clean x2 VECTRA IMP x2 ( Miss ESC ) OB-8F 3PH x2
(Rack power supply and the number of pumps removed)
Power COMDEL CPS1001S RF 13.56 Gen x4 COMDEL CX-600S RF 13.56 Gen x6 AE MDX-L12M-650 x3 RFPP LF10A x1 AE HFV 8000 2Mhz 5KW Gen x6 AC Rack x2
Pump OB-8F 3PH x4 Compressor CTI 9600 x4 |