Item Specifics
| Seller Item Code | EQ25E28 | Vintage | N/A |
|---|---|---|---|
| Wafer size | 300MM |
| Seller Item Code | EQ25E28 | Vintage | N/A |
|---|---|---|---|
| Wafer size | 300MM |
| 1. Product Name & Description | Suprema |
| 2. Equipment manufacturer | Mattson |
| 3. Configuration & Features | |
| 4. Process | Dielectric Etch |
| 5.Equipment list |
EFEM + TM + CH x2 + Rack x1 |