Item Specifics
| Seller Item Code | EQ25E25 | Vintage | N/A |
|---|---|---|---|
| Wafer size | 300MM |
| Seller Item Code | EQ25E25 | Vintage | N/A |
|---|---|---|---|
| Wafer size | 300MM |
| 1. Product Name & Description | Spectra CD-XT |
| 2. Equipment manufacturer | KLA TENCOR |
| 3. Configuration & Features | |
| 4. Process | Optical Critical Dimension |
| 5.Equipment list | EFEM + Process Module |