Item Specifics
| Seller Item Code | EQ25P07 | Vintage | N/A |
|---|---|---|---|
| Wafer size | 300MM |
| Seller Item Code | EQ25P07 | Vintage | N/A |
|---|---|---|---|
| Wafer size | 300MM |
| 1. Product Name & Description | CLEAN TRACK™ |
| 2. Equipment manufacturer | TOKYO ELECTRON |
| 3. Configuration & Features | ACT™12 |
| 4. Process | Coater/Developer Track |
| 5.Equipment list |
EFEM + Process Module + Chemical cabinet |