Item Specifics
| Seller Item Code | EQ25E15 | Vintage | 2019 |
|---|---|---|---|
| Wafer size | 300MM |
| Seller Item Code | EQ25E15 | Vintage | 2019 |
|---|---|---|---|
| Wafer size | 300MM |
| 1. Product Name & Description | 3300 |
| 2. Equipment manufacturer | SCREEN |
| 3. Configuration & Features | SU |
| 4. Process | Single Wafer Cleaner |
| 5.Equipment list |
8CH Process Modules -1 ( Center Robot ) 8CH Process Modules -2 ( EFEM Aligner ) FOUP / EFEM Modules H₂O₂ Supply / Delivery Module IPA Dry Module -1 IPA Dry Module -2 Oxide Removal Chemical Cabinet Standard Clean 1 Chemical Cabinet TBE Chemical Cabinet |